Thermopower detection of single nanowire using a MEMS device |
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| Affiliation: | 1. Korea Research Institute of Standards and Science, Daejeon 305-340, Republic of Korea;2. Korea Advanced Institute of Science and Technology, Daejeon 305-701, Republic of Korea;1. Apex Level Standards and Industrial Metrology Division, CSIR-National Physical Laboratory, New Delhi 110 012, India;2. Dept. of Mechanical, Production & Industrial Engg., Delhi Technological University, Delhi 110 042, India;1. Yildiz Technical University, Department of Mechanical Engineering, 34349 Besiktas, Istanbul, Turkey;2. Vienna University of Technology, Institute for Production Engineering and Laser Technology, Department of Interchangeable Manufacturing and Industrial Metrology, Karlsplatz 13/3113, A-1040 Wien, Austria;3. Istanbul Physical Medicine and Rehabilitation Training Hospital Istanbul, Orthopaedics and Traumatology Department, Turkey;4. Yildiz Technical University, Department of Mechatronics Engineering, 34349 Besiktas, Istanbul, Turkey;1. LNE, 29 avenue Roger Hennequin, 78197 Trappes, France;2. TOTAL, 2 place Jean Millier – La Défense 6, 92078 Paris La Défense, France;3. TENESOL, 12 allée du Levant, 69890 La Tour-de-Salvagny, France;1. Department of Engineering Mechanics, Kaunas University of Technology, K. Donelaicio 73, LT-44244 Kaunas, Lithuania;2. Department of Engineering Mechanics, Kaunas University of Technology, A. Mickeviciaus 37, LT-44244 Kaunas, Lithuania;3. Department of System Analysis, Kaunas University of Technology Studentu 50-407, LT-51368 Kaunas, Lithuania;4. Department of Machine Engineering, Vilnius Gediminas Technical University, J. Basanaviciaus g. 28, LT-03224 Vilnius, Lithuania;5. Precizika-Metrology, Zirmunu g. 139, LT-09120 Vilnius, Lithuania;1. Universidade de Évora, Centro de Geofísica de Évora, Instituto de Telecomunicações, Évora, Portugal;2. Universidade de Évora, Centro de Geofísica de Évora, Évora, Portugal;3. Institut für Angewandte Geowissenschaften, Technische Universität Darmstadt, Darmstadt, Germany;4. Instituto Superior Técnico, Universidade de Lisboa, Instituto de Telecomunicações, Lisboa, Portugal |
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| Abstract: | We present a MEMS-based device on a silicon nitride membrane in order to measure the thermoelectric properties of a single nanowire. A temperature gradient along a nanowire was generated by a nanoheater, and the temperature was measured by Pt thermometers. A thermal simulation using a finite element method was conducted to analyze the temperature distribution over the MEMS device. The validity of the MEMS device was established by testing the Pt nanowires which had different symmetry configurations. From the test results of Pt nanowires, a convincing temperature calibration method was proposed and applied to an actual case of Bi2Te3 nanowire. We measured a Seebeck coefficient of ?53 μV/K and electrical conductivity of 2.23 × 105 S/m for a single Bi2Te3 nanowire with a diameter of 70 nm at 300 K. Our solid design for thermoelectric measurements based on a membrane structure enables the fast and high-yield characterization of one-dimensional nanostructures. |
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| Keywords: | Thermoelectric measurement Nanowire MEMS Thermal simulation |
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