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Enhanced processing of coatings on glass surfaces
Authors:Dr Christoph Gerhard  Alexander Gredner  Nils Mainusch  Prof Wolfgang Viöl
Affiliation:Fraunhofer Institute for Surface Engineering and Thin Films IST, Application Center for Plasma and Photonics, G?ttingen, Germany, Von‐Ossietzky‐Str. 100, 37085 G?ttingen
Abstract:In this contribution, basic technically usable interactions of atmospheric pressure plasmas (APP), laser irradiation and solids as well as a technique which combines such plasmas and laser irradiation are introduced. Two examples for plasma‐enhanced laser processing of coatings on glass surfaces are presented in more detail. First, APP‐assisted annealing of amorphous silicon layers is discussed. It is shown that the crystallised area is notably increased by assisting plasmas where the particular improvement factor depends on the particularly applied type of plasma. Second, the impact of assisting plasmas on laser removal of lacquers and varnishes from glass surfaces is presented. By introducing a plasma jet to the laser removal process, the laser energy required for cleaning or delamination is notably reduced.
Keywords:
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