硅单模脊形光波导的三维模拟及实测结果

对当前硅光集成技术的热点、制备大断面低传播损耗单模脊形光波导进行了三维理论模拟设计。脊的上覆盖层是空气（大折射率台阶，非对称情况）或纯硅层（对称情况），均能得到符合实际的模拟结果。改变脊形光波导的高宽几何尺寸或折射率分布值，模拟结果呈现单模、双模或更高阶模的电场分布及光强分布。用相应条件指导硅脊形光波导的实际制备，实测结果表明模拟结果是准确的。

The Results of 3-D Simulation and Measurement for Silicon Single-mode Rib Optical Waveguide

3-dimension simulation for single-mode rib optical waveguide hasbeen studied. For both symmetry with upper cladding layer n1= 3. 5 and asymmetrywith n1=1. 0 cases,the simulation results are agreeable to the practice. By changingthe sizes and refractive indices of the waveguides, the output of the simulationshows electrical and optical fields distributions of single-mode,two-mode or even higher modes. Some real waveguides have been prepared with the instruction ofsimulation,and measurement showed the simulation to be excellent.