An analysis of the concave MOSFET

The electrical characteristics of the concave MOSFET are analyzed by the two-dimensional numerical method and the theoretical result is in reasonable agreement with the experimental result. Even if the channel length of the concave MOSFET is short, the obtained current-voltage characteristics of the concave MOSFET are quite similar to those of the long-channel normal MOSFET and can be approximated by the normal MOSFET formula. In short-channel concave MOSFET's, the threshold voltage lowering due to the short-channel effect is not observed. It is observed that the threshold voltage of the concave MOSFET depends strongly on the substrate bias voltage as compared with the long-channel normal MOSFET. These observed results are followed by the two-dimensional numerical analysis. The increase of the punch-through breakdown voltage as well as that of the surface induced avalanche breakdown voltage of the concave MOSFET is predicted theoretically. The equivalent circuit model of the concave MOSFET is shown and discussed.