| PZT薄膜的MOD制备及形成机理研究 |
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| 引用本文： | 包定华,张良莹,姚熹. PZT薄膜的MOD制备及形成机理研究[J]. 硅酸盐学报, 1998, 26(5): 592-597 |
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| 作者姓名： | 包定华 张良莹 姚熹 |
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| 作者单位： | 西安交通大学电子材料与器件研究所 |
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| 摘 要： | 采用金属有机物热分解（ＭＯＤ）工艺在Ｐｔ／Ｔｉ／ＳｉＯ２／Ｓｉ衬底上制备锆钛酸铅（ＰＺＴ）薄膜。ＸＲＤ分析显示薄结晶状态良好，无焦绿石相存在。ＡＥＳ测量表明：薄膜成分沿膜厚均匀分布，膜中无碳存在，表面不富含铅。分析了薄膜的形成机理，安性地解释了晶粒的生长过程。
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| 关 键 词： | 锆钛酸铅薄膜 热分解 MOD 铁电薄膜 PZT 陶瓷 |
PREPARATION AND FORMATION MECHANISM OF PZT THIN FILMS BY MOD TECHNIQUE |
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| Bao Dinghua,Zhang Liangying,Yao Xi. PREPARATION AND FORMATION MECHANISM OF PZT THIN FILMS BY MOD TECHNIQUE[J]. Journal of The Chinese Ceramic Society, 1998, 26(5): 592-597 |
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| Authors: | Bao Dinghua Zhang Liangying Yao Xi |
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| Abstract: | PZT thin films were prepared on Pt/Ti/SiO 2/Si(111) substrates by metallo_organic decomposition(MOD) technique. XRD analysis shows that the thin films possess good crystallinity, and no pyrochlore phase exists in thin films. It is found by AES measurement that the composition of the thin films is homogeneous, no carbon exists in thin films, and the surface of thin film is not lead_rich.The formation mechanism is discussed and the perovskite grain growth process is qualitatively explained in the paper. |
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| Keywords: | lead zirconate titanate thin film metallo_organic decomposition formation mechanism grain growth |
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