| InP基微机械可调滤波器结构特性分析 |
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| 引用本文： | 陈斌,周震,黄永清,任晓敏. InP基微机械可调滤波器结构特性分析[J]. 半导体光电, 2004, 25(5): 353-356,365 |
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| 作者姓名： | 陈斌 周震 黄永清 任晓敏 |
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| 作者单位： | 北京邮电大学,光通信中心,北京,100876;北京邮电大学,光通信中心,北京,100876;北京邮电大学,光通信中心,北京,100876;北京邮电大学,光通信中心,北京,100876 |
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| 基金项目： | 国家高技术研究发展计划(863计划) , 教育部科学技术研究项目 |
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| 摘 要： | 介绍了一种由静电驱动的InP基微机械可调滤波器,通过模拟此结构中DBR的反射谱和法布里-珀罗(F-P)腔的透射谱分析了其滤波性能.用有限元方法分析了几种典型微机械结构的调制特性和顶镜的动态响应特性.比较了不同结构镜面的平整度行为.为InP基微机械F-P腔的设计优化提供了有效参数依据.
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| 关 键 词： | 微机械 可调滤波器 悬臂 |
| 文章编号： | 1001-5868(2004)05-0353-04 |
Analysis of the Structure and Characteristic for an InP-based Micromechanical Tunable Filter |
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| CHEN Bin,ZHOU Zhen,HUANG Yong-qing,REN Xiao-min. Analysis of the Structure and Characteristic for an InP-based Micromechanical Tunable Filter[J]. Semiconductor Optoelectronics, 2004, 25(5): 353-356,365 |
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| Authors: | CHEN Bin ZHOU Zhen HUANG Yong-qing REN Xiao-min |
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| Abstract: | An InP-based micromechanical tunable filter by electrostatic actuation is introduced.Through simulations of the DBR reflectance spectra and the F-P cavity transimission spectra,the filter performances are analyzed.By means of finite element method,the tunning characteristics of the filters based on several typical micromechanical structures are presented.The dynamic behavior of the top mirror is investigated as well as the flatness comparison of the top mirror among these structures. It would be valuable reference for designing and optimizing the InP-based micromechanical F-P cavity devices. |
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| Keywords: | micromechanical tunable filter cantilever |
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