准分子激光加工参数对表面形貌影响的模糊分析

采用准分子激光微细加工方法 ,选用不同的工艺参数加工Al2 O3 陶瓷材料试件。通过表面轮廓仪测量并计算表面形貌统计参数。分析了激光加工工艺参数对表面形貌的影响 ,利用模糊分析方法 ,就激光器的放大器电压、激光脉冲频率、激光扫描速度等工艺参数对表面形貌轮廓均方根值Rq 的影响进行了评价。结果表明 ,Rq 值随激光器的放大器电压和激光脉冲频率的增大而增大 ,随激光扫描速度的增大而减小。分析得出 ,激光加工工艺参数对表面形貌的影响程度不同 ,由大到小依次为激光扫描速度、激光脉冲频率、放大器电压。因此 ,可以通过合理地选择工艺参数获得所需求的表面形貌 ,为表面微观形貌修饰提供了参考依据。

Effect of Excimer Laser Processing Parameters on Surface Topography and Its Fuzzy Analyses

Excimer laser texturing was performed on the surfaces of Al 2O 3 ceramic under a group of controlled processing parameters, in order to investigate the laser processing parameters in relationships with the surface topography. The surface micro-topography was measured by a profilometer. The trend and degree of the effect on surface topography parameters by processing parameters, such as amplified volt, laser scanning frequency and laser scanning speed, are analyzed. The analyses show that the surface parameter root-mean-square roughness R q underwent variations the same as amplified volt and laser scanning frequency, but opposite to laser scanning frequency. The results indicate that laser scanning speed has the biggest effect on surface topography parameters, followed by laser scanning frequency and amplified volt. Accordingly, the designed surface topography can be obtained with the proper processing parameters, which is important to modifying surface topography by laser.