| CVD金刚石涂层拉丝模的研制与应用 |
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| 引用本文： | 张志明,沈荷生,孙方宏,何贤昶,万永中.CVD金刚石涂层拉丝模的研制与应用[J].工具技术,2000,34(4):13-15. |
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| 作者姓名： | 张志明 沈荷生 孙方宏 何贤昶 万永中 |
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| 作者单位： | 上海交通大学微电子技术研究所,200052 |
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| 基金项目： | 国家 8 63计划新材料领域资助项目!(项目编号 :715 0 0 2 0 0 10 ) |
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| 摘 要： | :以市售大孔径 (>2mm)硬质合金拉丝模为衬底 ,经酸腐蚀去钴、研磨和还原处理后 ,以氢气和丙酮为原料 ,用穿孔直拉热丝CVD法制备了金刚石涂层。利用扫描电镜和喇曼谱图对涂层均匀性进行了评估。初步应用试验表明 ,金刚石涂层的附着力能满足实际拉伸要求 ,涂层拉丝模的工作寿命可提高 3～ 5倍。
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| 关 键 词： | 金刚石涂层 拉丝模 热丝CVD |
Fabrication and Application of CVD Diamond-coated Drawing Die |
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| Zhang Zhiming,et al.Fabrication and Application of CVD Diamond-coated Drawing Die[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2000,34(4):13-15. |
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| Authors: | Zhang Zhiming |
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| Affiliation: | Zhang Zhiming et al |
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| Abstract: | Diamond coated films are deposited by straight hot filament chemical vapor deposition (CVD) passing through the aperture of drawing die using a mixture of hydrogen and acetone as source gases. The substrate is drawing die made by cemented carbides with large aperture diameter (>2mm), and is pretreated by various methods including Co leaching in acid solution, lapping and decarbonisation. The homogenization and structure of films are characterized by scanning electron microscopy and Raman spectroscopy. The results of preliminary applied tests show that the adhesion of diamond coated film can meet the need of the practical drawing. The working lifetime of the drawing die with the diamond coated film can increase 3～5 times. |
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| Keywords: | diamond coated film drawing die hot filament CVD |
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