利用SiO2颗粒增强薄膜太阳能电池中硅膜对入射可见光的吸收

以正硅酸乙酯(TEOS：Tetraethoxysilane)、氨水、乙醇(EtOH：Ethyl Alcoh01)、去离子水为原料，采用溶胶-凝胶法，在普通玻璃衬底的上表面制备出一层最大粒径在400nm左右的SiO2颗粒，利用这层颗粒对可见光的散射作用，提高Si薄膜对入射可见光的吸收率。在相同的沉积条件下，分别在带有该层颗粒的玻璃和普通玻璃的E表面沉积了同样厚度的Si薄膜，制成两组样品。通过比较这两组样品在可见光波段的漫反射率和透射率以及Si薄膜样品的暗电导和定态光电导，证明该层颗粒增强了Si薄膜对入射可见光的吸收，有一定的实用前景。

Enhancement of Light Absorbance of Silicon Films in Thin Film Solar Cells by Silica Particles

A layer of silica particles were deposited on the upper surface of ordinary glass to enhance the visible -light absorbance of the silicon films in thin film solar cells.The silica particles, whose diameters are less than 400nm, were made from tetraethylethoxysilane (TEOS), ammonium, ethanol (EtOH) and deionized water by sol-gel method. The enhancement of the visible-light absorbance of silicon film is realized by light scattering effect of silica particles, In a PECVD, silicon films with the same thickness were deposited onto the upper surfaces of the glass covered by silica particles, and the glass which was bare, under the same conditions. By the method mentioned above, two groups of samples have been made, one has the layer of silica particles, while the other does not. The total reflectance and the transmittance of the two groups were measured, the dark conductance and the optical conductance of silicon films of the two groups were also measured and analyzed. Based on the outcomes of the measurements, it was proved that the silica particles has upgraded the performance of the silicon films and can be used in thin film solar cells in the near future.