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Micro packaged MEMS pressure sensor for intracranial pressure measurement |
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| Authors: | Liu Xiong Yao Yan Ma Jiahao Zhang Yanhang Wang Qian Zhang Zhaohua Ren Tianling |
| Affiliation: | 1. Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing 100085, China;2. Institute of Microelectronics, Tsinghua University, Beijing 100084, China |
| Abstract: | |
| Keywords: | intracranial pressure measurement lumbar puncture surgery BioMEMS quad flat no-lead package waterproof test |
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