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Preparation and electrical properties of undoped zinc oxide films by CVD
Authors:M. F. Ogawa  Y. Natsume  T. Hirayama  H. Sakata
Affiliation:(1) Department of Industrial Chemistry, Tokai University, 1117, Kitakaname, Hiratsuka-shi, 259-12 Kanagawa, Japan;(2) Research and Development General Division, Asahi Glass Co., Ltd., 2-1-2, Marunouchi, Chiyoda-ku, 100 Tokyo, Japan
Abstract:Part of the paper presented at the 1989 International Chemical Congress of Pacific Basin Societies, Honolulu, Hawaii, USA., 17–22 December 1989.
Keywords:
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