Preparation and electrical properties of undoped zinc oxide films by CVD |
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Authors: | M. F. Ogawa Y. Natsume T. Hirayama H. Sakata |
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Affiliation: | (1) Department of Industrial Chemistry, Tokai University, 1117, Kitakaname, Hiratsuka-shi, 259-12 Kanagawa, Japan;(2) Research and Development General Division, Asahi Glass Co., Ltd., 2-1-2, Marunouchi, Chiyoda-ku, 100 Tokyo, Japan |
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Abstract: | Part of the paper presented at the 1989 International Chemical Congress of Pacific Basin Societies, Honolulu, Hawaii, USA., 17–22 December 1989. |
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