| 亚微米电子束曝光机工件台控制系统 |
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| 引用本文： | 张福安 谭敏. 亚微米电子束曝光机工件台控制系统[J]. 电工电能新技术, 1995, 0(4): 49-54 |
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| 作者姓名： | 张福安 谭敏 |
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| 作者单位： | 中国科学院电工研究所 |
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| 摘 要： | 激光工件台是电子束曝光机关键部件之一，它主要功能是完成图形的拼接，本文描述了双频激光干涉仪，计算机控制的数字伺服系统以及真空条件下的ｘ－ｙ工件台，该系统用于亚微米圆形矢量扫描电子束曝光机中。
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| 关 键 词： | 电子束曝光机 双频激光干涉仪 工件台控制系统 |
STAGE CONTROL SYSTEM OF SUBMICROMETER ELECTRON BEAM EXPOSURE MACHINE |
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| ZHANG Fuan,TAN Min. STAGE CONTROL SYSTEM OF SUBMICROMETER ELECTRON BEAM EXPOSURE MACHINE[J]. Advanced Technology of Electrical Engineering and Energy, 1995, 0(4): 49-54 |
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| Authors: | ZHANG Fuan TAN Min |
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| Abstract: | Laser position stage is one of the key parts in electron beam exposure machine.It ismainly used to complete the pattern stitching. This article describes the measurement systemof double frequency laser interferometer digital servo driving system of micro-computer con-trol and the x-y stage working under the vacuum condition. The system is used is submi-crorneter vector scan electron beam exposure machine. |
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| Keywords: | elctron beam exposure machine double fretluency laser interfe-rometer controlsystem of working stage |
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