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Experimental evaluation of a spherical aberration-corrected TEM and STEM |
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| Authors: | Sawada Hidetaka Tomita Takeshi Naruse Mikio Honda Toshikazu Hambridge Paul Hartel Peter Haider Maximilian Hetherington Crispin Doole Ron Kirkland Angus Hutchison John Titchmarsh John Cockayne David |
| Abstract: | We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better than 0.12 nm. For scanning transmission electron microscopy, the Ronchigram flat area was >40 mrad in half-angle using the probe-forming Cs-corrector. |
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