离子注入金属材料表面改性

本文着重叙述了最近以来离子注入金属材料改性新的进展。离子注入金属的研究,其研究对象品种繁多,需要高注量,且样品形状复杂,因此离子注入金属中的物理问题比半导体离子注入更加复杂。包括各种离子注入多种金属所出现的溅射腐蚀、倾斜注入、特球形状注入、离子浓度分布、注入条件与金属相变的关系以及离子注入提高耐磨损机理等诸多难题。离子注入金属材料改性研究近年来极为活跃,已发表了不少评论文章。希望这篇评论能对从事离子束材料改性工作的人员有所帮助。

ION IMPLANTATION MODIFICATION OF METAL MATERIALS

The new progress of ion implantation modification of metal materials in recent years has been reviewed in this paper.A great variety and complex shapes of implanted workpieces and tools were studied and high dose is used for implantation of metals. So physical problems for implantation of metals are more complex than that of implantation for semiconductors.The key problems are sputtering, corrosion,tilt-implantation,complex shape of workpiece,ions concentra. tion profile of implantation, phase change and the mechanism of wear resistance and so on. The ion implantation into metal is extremely active research field in recent years.Many review papers have been published 1-4 .We hope this review would be able to help the researcher for implantation modification of meta's.