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限流电阻层改善碳纳米管场发射显示器发光均匀度的研究
引用本文:李昕,贺永宁,刘卫华,朱长纯. 限流电阻层改善碳纳米管场发射显示器发光均匀度的研究[J]. 半导体学报, 2008, 29(3): 574-577
作者姓名:李昕  贺永宁  刘卫华  朱长纯
作者单位:西安交通大学电子与信息工程学院,西安,710049
基金项目:国家自然科学基金,西安应用材料创新基金
摘    要:针对碳纳米管(CNT)场发射阴极薄膜中,CNT个体差异及其与衬底的不良接触对发光均匀性的影响,引入反馈限流电阻层以改善阴极薄膜的场发射发光均匀性.采用丝网印刷工艺在衬底上制备氧化锌作为电阻限流层,在其上制备CNT阴极薄膜.对CNT薄膜阴极的发射电流稳定性和均匀性进行了测试,给出了电阻限流层对场发射特性曲线的影响效果.SEM分析表明,氧化锌电阻层有利于消除CNT阴极的尖端屏蔽效应,并且使得CNT与衬底具有更加紧密的接触.场发射特性和场发射发光照片表明,虽然随着限流层厚度增加,阈值电压有所增加,发射电流有所减小,然而限流层的存在有效地改善了发射电流的稳定性,使得发射电流和场发射发光点分布更加均匀.

关 键 词:碳纳米管  场致发射显示器  氧化锌  稳定性
收稿时间:2015-08-18
修稿时间:2007-10-15

Improving Carbon Nanotube Field Emission Display Luminescence Uniformity by Introducing a Reactive Current Limiting Layer
Li Xin, He Yongning, Liu Weihua, Zhu Changchun. Improving Carbon Nanotube Field Emission Display Luminescence Uniformity by Introducing a Reactive Current Limiting Layer[J]. Journal of Semiconductors, 2008, In Press. Li X, He Y N, Liu W H, Zhu C C. Improving Carbon Nanotube Field Emission Display Luminescence Uniformity by Introducing a Reactive Current Limiting Layer[J]. J. Semicond., 2008, 29(3): 574.Export: BibTex EndNote
Authors:Li Xin  He Yongning  Liu Weihua  Zhu Changchun
Affiliation:School of Electronic and Information Engineering,Xi'an Jiaotong University,Xi'an 710049,China;School of Electronic and Information Engineering,Xi'an Jiaotong University,Xi'an 710049,China;School of Electronic and Information Engineering,Xi'an Jiaotong University,Xi'an 710049,China;School of Electronic and Information Engineering,Xi'an Jiaotong University,Xi'an 710049,China
Abstract:To eliminate the influence of the individual diversity of carbon nanotubes (CNTs) and poor contact between the CNTs and the substrate on the luminescence uniformity of the CNT field emission (FE) display cathode film,a reactive current limiting layer is introduced.The zinc oxide is screen printed on the substrate as a reactive current limiting layer and subsequently covered with the CNTs using the CVD method.The FE current stability and luminescence uniformity are tested and the influence of the reactive current limiting layer on the FE curve is studied.SEM images show that the ZnO layer not only eliminates the CNT tip shielding effect but also improves the contact between the CNTs and the substrate.FE curves and luminescence photos show that the threshold voltage increases as the thickness of the ZnO layer increases and as the FE current decreases.The current stability and luminescence uniformity are improved remarkably due to the ZnO layer.
Keywords:carbon nanotube   field emission display   ZnO   uniformity
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