| 一种具有隔振框架的解耦硅微陀螺 |
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| 引用本文： | 肖定邦,吴学忠,李伟东,董培涛,侯占强,李圣怡. 一种具有隔振框架的解耦硅微陀螺[J]. 半导体学报, 2008, 29(12): 2427-2431 |
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| 作者姓名： | 肖定邦 吴学忠 李伟东 董培涛 侯占强 李圣怡 |
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| 作者单位： | 1. 国防科技大学微系统实验室,长沙,410073
2. 中国电子科技集团第二十四研究所,重庆,400021 |
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| 基金项目： | 国家自然科学基金，国防科技大学优秀研究生创新资助项目 |
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| 摘 要： | 提出了一种利用隔振框架解耦的硅微陀螺,其驱动模态和检测模态不仅有各自独立的支撑结构,还有各自独屯的惯性质量块,隔振框架隔离了驱动结构和检测结构,减小了模态之间的交叉耦合;利用TMAH湿法腐蚀结合深反应离子刻蚀工艺,在n型<100>低阻硅片上制作出了微陀螺样片,并为其研制了配套的测控电路;测试结果表明,驱动模态频率为2.981kHz,品质因子为800,检测模态频率为2.813kHz,品质因子为34,刻度因子为38mV/(°/s),线性度优于0.8%,微陀螺在0.5h内的零偏稳定度为0.28°/s.
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| 关 键 词： | 硅微陀螺 解耦结构 隔振框架 |
| 收稿时间： | 2015-08-18 |
| 修稿时间： | 2008-08-29 |
A Decoupled Silicon Micromachined Gyroscope with Vibration Isolation Frame |
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| Xiao Dingbang, Wu Xuezhong, Li Weidong, Dong Peitao, Hou Zhanqiang, Li Shengyi. A Decoupled Silicon Micromachined Gyroscope with Vibration Isolation Frame[J]. Journal of Semiconductors, 2008, In Press. Xiao D B, Wu X Z, Li W D, Dong P T, Hou Z Q, Li S Y. A Decoupled Silicon Micromachined Gyroscope with Vibration Isolation Frame[J]. J. Semicond., 2008, 29(12): 2427.Export: BibTex EndNote |
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| Authors: | Xiao Dingbang Wu Xuezhong Li Weidong Dong Peitao Hou Zhanqiang Li Shengyi |
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| Affiliation: | Microsystem Laboratory,National University of Defense Technology,Changsha 410073,China;Microsystem Laboratory,National University of Defense Technology,Changsha 410073,China;No24 Research Institute,CETC,Chongqing 400021,China;Microsystem Laboratory,National University of Defense Technology,Changsha 410073,China;Microsystem Laboratory,National University of Defense Technology,Changsha 410073,China;Microsystem Laboratory,National University of Defense Technology,Changsha 410073,China |
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| Abstract: | A decoupled silicon micromachined gyroscope with vibration isolation frame is introduced.This structure employs independent suspension beams and inertial masses for the drive and sense modes.The drive and sense structures are separated by the vibration isolation frame,so the cross-coupling between the modes is reduced.The gyroscope is fabricated on the n-type 〈100〉 wafer using TMAH wet-etching and DRIE,and its read-out circuit is designed.Test results show that the frequencies of the drive and sense modes are 2.981 and 2.813kHz,and the quality factors of the drive and sense modes are 800 and 34.The scale factor is measured as 38mV/(°/s) with a nonlinearity of 0.8%.The short-term bias stability of this gyroscope in half an hour is 0.28°/s. |
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| Keywords: | silicon micromachined gyroscope decoupled structure vibration isolation frame |
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