新型快速准分子激光微加工方法制备毛细管电泳芯片的研究

选用聚合材料聚甲基丙烯酸甲酯(PMMA)代替玻璃,石英等作为毛细管电泳芯片的基片材料.在19 kV,5 Hz及5mm/min的加工参数下,采用新型快速准分子激光微加工方法完成了毛细管电泳芯片的制备.实验结果表明该方法加工过程简单,耗时短,自动化程度高,有效提高了芯片成品率和加工质量.芯片与相同尺寸的盖片在105℃、160 N、恒温20 min条件下通过热压键合在一起,得到密闭性好的整体芯片.最后在芯片上应用激光诱导荧光检测法对Cy5染料完成了分离检测,获得了重复性很好的检测信息.

A New High-Speed Excimer Laser Micromachining Method for PMMA based Capillary Electrophoresis Chip

Polymaths Methacrylate ( PMMA )was chosen as the substrate instead of glass or quartz. A new high-speed excimer laser micro-machining technique was adopted as the fabrication method. A PMMA based electrophoresis chip was fabricated under 19Kv, 5Hz and 5mm/min parameters. The method with simple processing, short time consuming and auto characters can effectively increase the rate of production and the quality of chips. The chip was bonded together with another same size cover chip under 105 ?C, 160N and holding time 20 min using hot bonding method. The bonded chip can seal micro fluid well and endure high pressure. In the end, the Cy5 dye was successfully separated on the chip using laser-induced fluorescence detection method and got higher repeatedly detection information.