Reliability assessment of a MEMS microphone under mixed flowing gas environment and shock impact loading |
| |
| Affiliation: | 1. Department of Electronics, Aalto University School of Electrical Engineering, P.O. Box 13340, FIN-00076 Aalto, Finland;2. Nokia Corporation, Salo, Finland;1. Advanced Sustainable Manufacturing Technologies (ASTUTE), College of Engineering, Swansea University, Singleton Park, Swansea SA2 8PP, United Kingdom;2. Electronic Motion Systems UK Ltd., Heol-y-Ddraig, Penllergaer Business Park, Penllergaer, Swansea SA4 9HL, United Kingdom;1. Transducers and Actuators Group, CSIR-Central Electronics Engineering Research Institute, Pilani, 333031, Rajasthan, India;2. University School of Basic & Applied Sciences, Guru Gobind Singh Indraprastha University, New Delhi, 110078, India;1. Czech Technical University in Prague, Faculty of Transportation Sciences, Prague, Czech Republic.;2. Laboratoire Commun de Métrologie LNE-Cnam, La Plaine Saint Denis, France.;3. Laboratoire d’Acoustique de l’Université du Maine (LAUM, UMR CNRS 6613), Le Mans, France.;1. Laboratoire d’Acoustique de l’Université du Mans, LAUM - UMR 6613 CNRS, Le Mans Université, Avenue Olivier Messiaen, 72085 LE MANS CEDEX 9, France;2. Czech Technical University in Prague, Faculty of Transportation Sciences, Konviktská 20, 110 00 Praha 1, Czech Republic;3. Czech Technical University in Prague, Faculty of Electrical Engineering, Technická 2, 166 27 Praha 6, Czech Republic |
| |
| Abstract: | In this work the reliability of a Micro-Electro-Mechanical Systems (MEMS) microphone is studied through two accelerated life tests, mixed flowing gas (MFG) testing and shock impact testing. The objective is to identify the associated failure mechanisms and improve the reliability of MEMS devices. Failure analyses are carried out by using various tools, such as optical microscopy, scanning electron microscopy (SEM), energy dispersive X-ray spectrometry (EDS). Finite element analysis is also conducted to study the complex contact behaviors among the MEMS elements during shock impact testing. The predicted failure sites are in agreement with the experimental findings. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
