Influence of surface states on the voltage robustness of AlGaN/GaN HFET power devices |
| |
| Affiliation: | 1. WIN Semiconductors Corp., No. 35, Technology 7th Road, Hwaya Technology Park, Kuei Shan Hsiang, Tao Yuan Shien 333, Taiwan;2. Current address: School of Electrical and Electronic Engineering, Newcastle University, Newcastle, NE1 7RU, UK;1. Department of Materials Science & Engineering, National Chiao Tung University, Hsinchu, 30010, Taiwan, ROC;2. Department of Electronics Engineering, National Chiao Tung University, Hsinchu, 30010, Taiwan, ROC;3. Taiwan Semiconductor Research Institute, Hsinchu, 30078, Taiwan, ROC;1. Department of Electronics Engineering, Institute of Electronics National Chiao-Tung University, Hsinchu 300, Taiwan;2. Department of Materials Science & Engineering, National Chiao-Tung University, Hsinchu 300, Taiwan;3. Institute of Photonics Technologies, National Tsing-Hua University, Hsinchu 300, Taiwan;4. International College of Semiconductor Technology, National Chiao-Tung University, Hsinchu 300, Taiwan |
| |
| Abstract: | In this work we discuss the influence of the donor-like surface state density (SSD) on leakage currents and the breakdown voltages of AlGaN/GaN heterostructure field-effect transistors (HFET) at high temperature reverse bias (HTRB) step stress. A method to extract charges at the surface by high voltage capacitance voltage (HV–CV) profiling of the gate–drain diode of a HFET is presented. Two samples with different surface passivation are compared. The SSD of the first sample is found to be similar to the polarization charge, whereas it is elevated by a factor of three on the second sample. The influence of the SSD on the electric field is investigated with electroluminescence (EL). The elevated SSD of the second sample engenders severe deficiencies in robustness found in the HTRB. The stress data, the simulation model and the images of EL indicate that the catastrophic failure arises in the dielectric underneath the gate field plate (GFP). |
| |
| Keywords: | GaN Reliability Surface charge Electroluminescence HTRB Capacitance–voltage profiling |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
