| 燃焰法沉积金刚石薄膜的成核与生长 |
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| 引用本文： | 黄树涛 姚英学. 燃焰法沉积金刚石薄膜的成核与生长[J]. 哈尔滨工业大学学报, 1996, 28(4): 84-87 |
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| 作者姓名： | 黄树涛 姚英学 |
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| 作者单位： | 哈尔滨机械工程系 |
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| 摘 要： | 用扫描电镜研究了燃焰法沉积金刚石薄膜的成核与生长行为．分析了从成核至形成连续膜期间金刚石晶粒的生长特点．研究了沉积时间对金刚石薄膜晶体形态和表面形貌的影响。
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| 关 键 词： | 燃焰法 金刚石薄膜 成核 生长 沉积 |
Nucleation and Growth of Diamond Films Deposited by Combustion Flame Method |
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| Huang Shutao,Yao Yingxue,Zhang Hongzhi,Chen Shuodong,Yuan Zhejun. Nucleation and Growth of Diamond Films Deposited by Combustion Flame Method[J]. Journal of Harbin Institute of Technology, 1996, 28(4): 84-87 |
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| Authors: | Huang Shutao Yao Yingxue Zhang Hongzhi Chen Shuodong Yuan Zhejun |
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| Abstract: | The nucleation and growth behavior of diamond films deposited by the combustion flame method have been investigated with SEM.The growth featrues of diamond have have been analyzed from nucleation to forming continuous films.The influences of growth time on the crystal structure and surface morphology have been discussed. |
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| Keywords: | Combustion flame method diamond films crystal morphology |
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