高功率激光反射镜变形的半导体致冷补偿的研究

激光谐振腔中的反射镜在激光作用下其镜面产生变形，使反射镜面偏离原设计要求。实验表明，半导体致冷铜镜和硅镜可以很好地补偿激光热变形，使反射镜在承受激光功率的时候，其镜面面型保持不变。此外，半导体致冷镜还有无压力变形、致冷量可控、致冷均匀等优点。

Research of Laser Reflectors Cooled by a Thermoelectric Refrigerator

The surface distortion of reflector mirrors in the laser cavity caused by high laser power changes the designed mirror surface that should be highly strict in the laser of good beam quality. The experiments show that both the copper reflector and the silicon reflector cooled by the thermoelectric refrigerator can compensate the distortion caused by laser power, so that the reflector surface is unchanged when it works. There are many other advantages of this kind of reflectors, such as no pressure distortion, the refrigerating power can be easily controlled and the cooling is even.