On the behaviour of buried oxygen implanted layers in highly doped GaAs

Highly doped GaAs substrate material (doping level 10¹⁸ cm^?3) has been implanted with 350 keV O⁺ ions with doses of 10¹⁴ – 10¹⁶ cm^?2 to produce high resistivity layers which are stable at high temperatures. LPE growth of flat GaAs epilayers onto the implanted wafers was achieved up to doses of about 1 × 10¹⁵ O⁺/cm² and 5 × 10¹⁵O⁺/cm² for RT and 200°C implants, respectively. N-o-n and p-o-n structures (o: oxygen implanted) were fabricated in which breakdown voltages of up to 15 V were obtained. Examples for application of this isolation technique are shown.