| 基于Simul8的半导体生产线建模关键技术研究 |
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| 引用本文： | 方明,乔非,刘文胜,许潇红.基于Simul8的半导体生产线建模关键技术研究[J].计算机工程,2006,32(19):248-250. |
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| 作者姓名： | 方明 乔非 刘文胜 许潇红 |
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| 作者单位： | 1. 同济大学电子与信息工程学院,上海,200092
2. 上海贝岭股份有限公司,上海,200233 |
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| 基金项目： | 国家重点基础研究发展计划(973计划);国家自然科学基金 |
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| 摘 要： | 在对半导体硅片制造生产线进行建模和仿真的过程中,提出了非动态加工区和动态加工区的分类思想,给出了各自基于Simul8的实现方法。对于高度复杂的动态加工区,给出了3种解决方法,从仿真速度上比较其优劣。仿真应用表明,提出的半导体生产线分类方法有效改进了仿真的性能,使仿真指导生产具有可行性。
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| 关 键 词： | 建模仿真 动态加工区 二级缓冲区 存储空间 |
| 文章编号： | 1000-3428(2006)19-0248-03 |
| 修稿时间： | 2005年10月26 |
Research on Key Technique of Modeling Semiconductor Production Line Based on Simul8 |
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| FANG Ming,QIAO Fei,LIU Wensheng,XU Xiaohong.Research on Key Technique of Modeling Semiconductor Production Line Based on Simul8[J].Computer Engineering,2006,32(19):248-250. |
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| Authors: | FANG Ming QIAO Fei LIU Wensheng XU Xiaohong |
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| Affiliation: | (1. College of Electronics and Information Engineering, Tongji University, Shanghai 200092; 2. Shanghai Belling Co., Ltd. , Shanghai 200233) |
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| Abstract: | During the process of modeling and simulating the wafer production line,a classification of static and dynamic process region is presented and implemented based on Simul8 software.For the high complicated dynamic process region,three ways of solution are presented,and their advantages and disadvantages are compared.The simulation results show that this key technique of dealing with the semiconductor production line can improve the performance of simulation,and make production guided by simulation possible. |
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| Keywords: | Modeling and simulation Dynamic process region Secondary buffer Buffer space |
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