| 声子晶体点缺陷模式质量传感的位置解耦方法 |
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| 引用本文： | 龙斌,李鹏,刘永顺,李峰,吴一辉.声子晶体点缺陷模式质量传感的位置解耦方法[J].压电与声光,2016,38(3):382-385. |
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| 作者姓名： | 龙斌 李鹏 刘永顺 李峰 吴一辉 |
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| 作者单位： | （1.中国科学院 长春光学精密机械与物理研究所，应用光学国家重点实验室，吉林 长春 130033；,2.中国科学院大学，北京 110049） |
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| 基金项目： | 国家自然科学基金资助项目（51205381，61271139)；“八六三”计划基金资助项目（2015AA042402）；中国科学院科研装备研制基金资助项目（yz201353）；吉林省科技发展计划基金资助项目（20140101057JC，20130522185JH，20150520110JH）；吉林省“双十工程”重大科技攻关基金资助项目（201402011GX）；吉林省省级经济结构战略调整引导资金专项基金资助项目(2015Y028) |
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| 摘 要： | 声子晶体点缺陷微小的振动质量和高品质因数(Q)使之用于质量传感时可以提高灵敏度和分辨率,但其灵敏度受被测物位置影响。制作硅基点缺陷结构,建立了计算缺陷模式的质量灵敏度的弹簧-振子模型。通过实验验证,实验中最高灵敏度为9.1Hz/ng。提出了一种利用多模式的灵敏度分布差异对质量和位置进行解耦的算法,并予以仿真验证。采用3种和8种模式测量质量的相对误差分别为2.6%和0.43%。
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| 关 键 词： | 质量传感器 声子晶体 位置解耦 点缺陷 灵敏度 |
Position Decoupling Method of Mass Sensor Based on Point Defect Modes in Phononic Crystal |
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| LONG Bin,LI Peng,LIU Yongshun,LI Feng and WU Yihui.Position Decoupling Method of Mass Sensor Based on Point Defect Modes in Phononic Crystal[J].Piezoelectrics & Acoustooptics,2016,38(3):382-385. |
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| Authors: | LONG Bin LI Peng LIU Yongshun LI Feng and WU Yihui |
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| Affiliation: | (1.State Key Lab. of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;,2.University of Chinese Academy of Sciences, Beijing 110049, China) |
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| Abstract: | The tiny resonant mass and high Q performance of phononic crystal (PC) point defect make it an excellent candidate for high sensitivity and resolution mass sensors, but its mass sensitivity is highly dependent on the mass positions. In this paper, we fabricate the silicon based PC point defect structures and establish a spring mass model to evaluate the mass sensitivities of the defect modes. The experimental results agree well with the model and the highest mass sensitivity of 9.1 Hz/ng is obtained. Furthermore, we propose a method utilizing the diverse sensitivity distributions of the defect modes to decouple the mass and position simultaneously and demonstrate it in simulation. The results show that the relative errors are 2.6% and 0.43% respectively with 3 and 8 modes for mass measurement. |
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| Keywords: | mass sensors phononic crystal location decoupling point defect sensitivity |
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