Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures |
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Authors: | Weisheng Yue Jeroen Anton van Kan Linke Jian Thomas Osipowicz Frank Watt |
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Affiliation: | a Centre for Ion Beam Applications, Department of Physics, National University of Singapore, Singapore 117542, Singapore b Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603, Singapore |
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Abstract: | We present an approach to fabricate tall high aspect ratio Au microstructures by means of proton beam direct writing. Combining proton beam direct writing and electroplating, we successfully produced gold structures with sub-micrometer lateral dimensions, structure heights in excess of 11 μm, and aspect ratios over 28. Sidewall quality of the Au structures was improved by lowering the process temperature to 20 °C when developing PMMA patterns with GG developer. The application of such structures as X-ray masks for deep X-ray lithography with synchrotron radiation was demonstrated. |
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Keywords: | 07.78.+s 85.40.Hp 81.16.Nd 81.15.Pq |
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