Optical emission from Be, Cu and CuBe targets during ion beam sputtering |
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| Authors: | M. Ait El Fqih P.-G. Fournier |
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| Affiliation: | a Equipe SIAM - UFR: MEC, Département de Physique, Faculté des Sciences Semlalia, Université Cadi Ayyad, 79 Lot Ennaourass I, B.P. 2390 Marrakech, Morocco
b Laboratoire de Spectroscopie de Translation des Interactions Moléculaires, Université Paris-Sud, Bât. 478, 91405 Orsay, France |
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| Abstract: | A spectral structure of the radiation (190-590 nm) emitted during sputtering of polycrystalline Cu, Be and CuBe targets by Kr+ ions with 5 keV have been presented. Evolution of surface composition during ion beam sputtering is investigated. Several time scales are distinguished, corresponding to different processes: the elimination of surface contaminants, the removal of the corroded layer. The implications for the use of ion beam optical spectroscopy in surface analysis are discussed. In the case of Be and Cu98 Be2, a molecular structure appears between 492 nm and 502 nm. It is similar for both samples and is ascribed to de-excitation of BeH. |
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| Keywords: | 68.49.Sf 79.20.Rf |
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