Growth of silicon nitride films by bombarding amorphous silicon with N ions: MD simulation |
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Authors: | F Gou AW Kleyn AE Yakshin |
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Affiliation: | a FOM-Institute for Plasma Physics Rijnhuizen, Ass. EURATOM-FOM, Nieuwegein, P.O. Box 1207, 3430 BE Nieuwegein, The Netherlands b MESA+Institute for Nanotechnology, University Twente, Enschede, The Netherlands |
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Abstract: | In this study, the molecular dynamics simulation method was employed to investigate the growth of silicon nitride films by using N+ ions, with energies of 50, 100, 150 and 200 eV, to bombard an amorphous silicon surface at 300 K. After an initial period of N+ bombardment, saturation of the number of N atoms deposited on the surface is observed, which is in agreement with experiments. During subsequent steady state deposition, a balance between uptake of N by the surface and sputtering of previously deposited N is established. The Si(Nx) (x = 1-4) and N(Siy) (y = 1-3) bond configurations in the grown films are analyzed. |
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Keywords: | 31 15 xv 61 72 uf 68 55 Ln 81 15 -z |
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