| 掺硅类金刚石薄膜的制备及其微观机械性能研究 |
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| 引用本文： | 王智.掺硅类金刚石薄膜的制备及其微观机械性能研究[J].河北化工,2011,34(8):66-68. |
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| 作者姓名： | 王智 |
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| 作者单位： | 河南化工技师学院,河南开封,475004 |
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| 基金项目： | 致谢:本文所用实验设备和性能表征检测仪器由河南大学特种功能材料重点实验室提供;谨致谢意 |
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| 摘 要： | 采用射频感应耦合离子源（ICP）在硅基底上沉积了DLC薄膜,并利用离子束溅射固体单晶石墨的方法掺入Si元素。通过原子力显微镜（AFM）和拉曼光谱对DLC薄膜的表面形貌及结构进行了分析表征。并用UTM-2摩擦磨损试验仪对薄膜进行了刻划测试,通过临界载荷的对比,分析了掺硅和纯DLC薄膜与基底的结合能力。结果表明,掺硅DLC薄膜具有良好的膜-基结合能力。
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| 关 键 词： | Si-DLC薄膜 射频感应耦合 离子束溅射 微观机械性能 |
Preparation and Micro-mechanical Behavior of Si-DLC Films |
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| WANG Zhi.Preparation and Micro-mechanical Behavior of Si-DLC Films[J].Hebei Chemical Engineering and Industry,2011,34(8):66-68. |
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| Authors: | WANG Zhi |
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| Affiliation: | WANG Zhi(Henan Institute of Chemical Engineering Technician,Kaifeng 475004,China) |
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| Abstract: | Diamond-like carbon films（DLC films） were prepared from C2H2 by inductively coupled plasma（ICP） assisted CVD,and Si was doped by ion beam sputtering deposition at the same time.The surface topography and microstructure of the films were measured by AFM an |
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| Keywords: | Si-DLC films ICP ion beam sputtering deposition micro-mechanical behavior |
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