| Characterization and wear properties of nanoscaled TiN/TaN multilayer coatings |
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| 引用本文： | 安健 张庆瑜. Characterization and wear properties of nanoscaled TiN/TaN multilayer coatings[J]. 中国有色金属学会会刊, 2006, 16(A02): 59-64 |
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| 作者姓名： | 安健 张庆瑜 |
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| 作者单位： | [1]Key Laboratory of Automobile Materials, Ministry of Education, Jilin University, Changchun 130025, China [2]State Key Laboratory for Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116023, China |
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| 基金项目： | Project （20050509） supported by the National Science Foundation of Jilin Province, China |
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| 摘 要： |
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| 关 键 词： | 氮化物 TiN/TaN 多层复层 物理汽相淀积 磨损性质 |
| 收稿时间： | 2006-04-20 |
| 修稿时间： | 2006-06-30 |
Characterization and wear properties of nanoscaled TiN/TaN multilayer coatings |
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| AN Jian, ZHANG Qing-yu. Characterization and wear properties of nanoscaled TiN/TaN multilayer coatings[J]. Transactions of Nonferrous Metals Society of China, 2006, 16(A02): 59-64 |
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| Authors: | AN Jian ZHANG Qing-yu |
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| Abstract: | The structural, morphological, mechanical and tribological characterization of nanoscaled multilayer TiN/TaN coatings deposited by magnetron sputtering technology were investigated by low angle X-ray diffractometry, high angle X-ray diffractometry, atomic force microscopy, microhardness, pin-on-disc testing and 3-D surface profiler. The results show that the TiN/TaN coatings exhibit good modulation period and sharp interface between TiN and TaN layers. In mutilayered TiN/TaN coatings, TiN layers have cubic structure, but hexagonal structure emerged among TaN layers besides cubic structure as modulation period is beyond 8.5 nm. The mierohardness is affected by modulation period and the maximum hardness value of 31.5 GPa appears at a modulation period of 8.5 rim. The coefficient of friction is high and the wear resistance is improved for TiN/TaN coatings compared with those of TiN coating; the wear mechanism exhibits predominantly ploughing, material transfer and localized spallation. |
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| Keywords: | multilayer coatings nitrides physical vapor deposition wear properties |
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