Characterization and tribological investigation of sol-gel Al2O3 and doped Al2O3 films

Thin films of Al₂O₃ and doped Al₂O₃ were prepared on a glass substrate by dip coating process from specially formulated ethanol sols. The morphologies of the unworn and worn surfaces of the films were observed with atomic force microscope (AFM) and scanning electron microscope (SEM). The chemical compositions of the obtained films were characterized by means of X-ray photoelectron spectroscopy (XPS). The tribological properties of obtained thin films sliding against Si₃N₄ ball were evaluated and compared with glass slide on a one-way reciprocating friction tester. XPS results confirm that the target films were obtained successfully. The doped elements distribute in the film evenly and exist in different kinds of forms, such as oxide and silicate. AFM results show that the addition of the doped elements changes the structure of the Al₂O₃ films, i.e., a rougher and smoother surface is obtained. The wear mechanisms of the films are discussed based on SEM observation of the worn surface morphologies. As the results, the doped films exhibit better tribological properties due to the improved toughness. Sever brittle fracture is avoided in the doped films. The wear of glass is characteristic of brittle fracture and severe abrasion. The wear of Al₂O₃ is characteristic of brittle fracture and delamination. And the wear of doped Al₂O₃ is characteristic of micro-fracture, deformation and slight abrasive wear. The introduction of ZnO is recommended to improve the tribological property of Al₂O₃ film.