Characterization of high quality RTCVD relaxed Si1?xGex grown on ge graded buffer layers on Si by photoluminescence spectroscopy |
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Authors: | G Bremond A Souifi O De Baeros A Benmansour F Ducroquet P Warren D Dutartre |
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Affiliation: | (1) Laboratoire de Physique de la Matiere (URA CNRS 358), 20 avenue Albert Einstein - 69621, Bat. 502 - INSA Villeurbanne cedex, France;(2) FRANCE TELECOM-CNET, BP 98 F-38243 Meylan cedex, France;(3) Present address: Institut d’Electronique et de Microelectronique du Nord.(UMR CNRS 9929), cite scientifique BP 69, 59652 Villeneuve d’Ascq cedex, France |
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Abstract: | Relaxed Si1−xGex layers grown by rapid thermal chemical vapor deposition (RTCVD) have been characterized by photoluminescence (PL) spectroscopy.
The structures consist of a Si1−xGex capping layer with a 0.32 and 0.52 Ge concentration, grown on a compositionally graded Si1−xGex buffer layer. The effect of the composition grading rate on the layer quality has been intensively studied. Well-resolved
near band edge luminescence (excitonic lines with no-phonon and phonon replica similar as in bulk SiGe alloys) coming from
the relaxed alloy capping layer and dislocation-related bands (Dl, D2, D3, D4 lines) in the graded buffer layer have been
measured. The electronic quality of this relaxed capping layer, controlled by the design of the compositionally graded buffer
layer, has been determined by the excitonic photoluminescence. A detailed analysis of the energy of the D4 dislocation band
demonstrates that the main misfit dislocations remain confined in the first steps of the graded buffer layer. Si1−xGex layers grown on these pseudo-substrates either under compressive or tensile strain and the well-defined PL results obtained
are discussed on the bases of strain symmetrization and of high quality of the layers. This points out the possibility of
using such high quality relaxed Si1−xGex layers as substrates for the integration of new devices associated with Si technology. |
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Keywords: | Photoluminescence RTCVD SiGe |
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