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热处理效应对Sn-Al与Sn-Ca纳米薄膜的电磁屏蔽机制
引用本文:洪飞硕,洪飞义,江哲铭,吕传盛. 热处理效应对Sn-Al与Sn-Ca纳米薄膜的电磁屏蔽机制[J]. 中国有色金属学会会刊, 2011, 21(9): 2020-2025. DOI: 10.1016/S1003-6326(11)60966-7
作者姓名:洪飞硕  洪飞义  江哲铭  吕传盛
作者单位:国立成功大学建筑学系;国立成功大学纳米科技微工程研究所;国立成功大学材料科学与工程学系;
基金项目:the Center for Micro/Nano Science and Technology,National Cheng Kung University(NCKU Project of Promoting Academic Excellence&Developing World Class Research Center:D97-2700); NSC98-2221-E-006-068;NSC98-2622-E-006-024-CC3 for the financial support
摘    要:利用溅镀Sn-Al纳米薄膜和Sn-Cu纳米薄膜讨论结晶机制与膜厚对电磁波屏蔽特性的影响,比较了Sn-Al和Sn-Cu薄膜的高温显微组织、导电性与电磁波屏蔽性能。结果表明,高温处理提高了Sn-Al纳米薄膜的电磁波屏蔽性。在低频条件下,高Cu摩尔浓度的Sn-Cu纳米薄膜不能有效改善电磁波屏蔽性;高温处理后,低Cu摩浓度的Sn-Cu纳米薄膜能提高低频的电磁波屏蔽性,而高频下的电磁波屏蔽性则呈相反趋势。

关 键 词:电磁波屏蔽  Sn-Al  Sn-Cu  薄膜
收稿时间:2010-10-21

Annealing effects of Sn-Al and Sn-Cu nano thin films on mechanism of electromagnetic interference shielding
HUNG Fei-shuo,HUNG Fei-yi,CHIANG Che-ming,LUI Truan-sheng. Annealing effects of Sn-Al and Sn-Cu nano thin films on mechanism of electromagnetic interference shielding[J]. Transactions of Nonferrous Metals Society of China, 2011, 21(9): 2020-2025. DOI: 10.1016/S1003-6326(11)60966-7
Authors:HUNG Fei-shuo  HUNG Fei-yi  CHIANG Che-ming  LUI Truan-sheng
Affiliation:HUNG Fei-shuo1,HUNG Fei-yi2,CHIANG Che-ming1,LUI Truan-sheng3 1. Department of Architecture,National Cheng Kung University,Tainan,China,2. Institute of Nanotechnology and Microsystems Engineering,Center for Micro/Nano Science and Technology,3. Department of Materials Science and Engineering
Abstract:The sputtered Sn-Al and Sn-Cu thin films were used to investigate the effects of the crystallization mechanism and film thickness on the electromagnetic interference (EMI) characteristics. In addition, the annealed microstructure, electrical conductivities and EMI characteristics of the Sn-xAl films and the Sn-xCu films were compared. The results show that the electromagnetic interference (EMI) shielding of Sn-Al film was increased after annealing. For the Sn-Cu films with higher Cu mole concentration, the ...
Keywords:electromagnetic interference (EMI)  Sn-Al  Sn-Cu  thin film  
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