Portable nano probe for micro/nano mechanical scratching and measuring

A nano probe system which can measure precise micro parts or optical parts in nanometer range resolution and scratch contact force in mN scale was demonstrated. The nano probe was originally designed for on-machine measuring applications and one kind of contact type measuring probes was designed for miniaturized or microfactory system. It ideally should be of small size and able to measure surface topography in nanometer scale. A commercial capacitive displacement sensor was proposed. It was a new concept i...