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Effect of ammonia gas etching on growth of vertically aligned carbon nanotubes/nanofibers |
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| Authors: | Sang-Gook KIM Sooh-Yung KIM Hyung-Woo LEE |
| Affiliation: | Sang-Gook KIM1,Sooh-Yung KIM1,Hyung-Woo LEE 1,2 1. Department of Mechanical Engineering,Massachusetts Institute of Technology,77 Massachusetts Ave,Cambridge MA 02139,USA,2. National Core Research Center for Hybrid Materials Solution,Pusan National University,Busan 609-735,Korea |
| Abstract: | The etching effect of ammonia (NH3) on the growth of vertically aligned nanotubes/nanofibers (CNTs) was investigated by direct-current plasma enhanced chemical vapor deposition (DC-PECVD). NH3 gas etches Ni catalyst layer to form nanoscale islands while NH3 plasma etches the deposited amorphous carbon. Based on the etching effect of NH3 gas on Ni catalyst, the differences of growing bundles of CNTs and single strand CNTs were discussed; specifically, the amount of optimal NH3 gas etching is different betwee... |
| Keywords: | carbon nanotube ammonia etching nickel catalyst plasma enhanced chemical vapor deposition (PECVD) |
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