半导体陶瓷型薄膜气敏传感器的研究进展

半导体陶瓷型薄膜气敏传感器，具有灵敏度高、与气体反应快、制备成本较低等优点，已经成为近年传感器研究和开发的重点．是未来气敏传感器的发展方向之一。本文介绍了陶瓷型半导体薄膜气敏传感器常见的器件结构、薄膜材料的主要制备方法．部分主要的半导体金属氧化物薄膜气敏材料．以及近期相关的研究进展，并扼要分析了今后的发展方向。

Progresses of the thin film gas sensors based on semiconducting ceramics

Thin film gas sensors based on semiconducting ceramics have various advantages over the traditional bulk gas sensors, such as higher sensitivity, faster responsibility, and lower cost. Recent years the researches on this kind of sensors have got much attention in the research and development fields for gas sensors. It was believed that the film gas sensors based on semiconducting ceramics will be one of the development trends in gas sensors research in the near future. In this paper a review on the thin film gas sensors based on semiconducting ceramics in recent years was presented, the structures of the thin film gas sensor were outlined, the gas sensor materials and the manufacturing methods for the thin films were summed up, and some development features in the coming years were briefly analyzed.