测试样品的扫描电镜图像缺陷原因及解决方法

扫描电子显微镜对待测样品的要求极其严格,样品一定要不含水分、无磁性、无毒性且成分稳定,不导电和导电性差的样品要通过离子溅射仪镀膜,它是样品进行微观分析时的重要实验手段。本研究以各研究室送的检测样品为材料,应用扫描电子显微镜对各类样品进行表征。在具体操作时会出现荷电效应、边缘效应、电子束损伤、污染这4种常见的扫描电镜图像缺陷,分析了其影响因素,提出可以通过使样品导电法、降低电压法、快速观察法及减少污染法等方法解决图像缺陷问题,并展示了结果。

Reason and SoIution of Imaging Defect in SEM for The Testing Sample

The requirements of the testing sample of Scanning electron microscopy are extremely strict, the sample must be free of moisture, non-magnetic, non-toxic and stable. The sample without or with poor conduc- tire should be coated.The Scanning electron microscopy is an important experimental method.The present paper introduces the basic principle and the feature of the SEM. It discusses the defects of the images of the Scanning Electron Microscope, including electric charge effect, damage, edge effect, pollution, analyzes the reasons of the defects, suggests solutions and shows results.