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Microstructure and AMR Properties of Permalloy Films Sputtered on (Ni_ (0.81)Fe_(0.19)_ (0.66)Cr_(0.34 )Buffer
作者姓名:杨晓非
作者单位:Huazhong University
基金项目:FundedbytheNaturalScienceFoundationofHubeiProvince(No .2 0 0 2AB0 32 )
摘    要:1 IntroductionTheanisotropicmagnetoresistanceeffect (AMR)waswidelystudiedinthepastyearsbecauseofitspracticalapplicationinmagneticandelectronicdevices ,eg ,themagneticsensorsandreadouthead1 3 ] .Ni0 .81Fe0 .19hasex cellentmagneticsoftness ,andwasgenerall…


Microstructure and AMR Properties of Permalloy Films Sputtered on (Ni0.81Fe0.19)0.66Cr0.34 Buffer
YANG Xiao-fei PENG Zi-long LIAO Hong-wei LI Zuo-yi Huazhong University of Science and Technology, Institute of Physics and Center of Condensed Physics,Chinese Academy of Sciences.Microstructure and AMR Properties of Permalloy Films Sputtered on (Ni_ (0.81)Fe_(0.19)_ (0.66)Cr_(0.34 )Buffer[J].Journal of Wuhan University of Technology. Materials Science Edition,2004,19(1).
Authors:YANG Xiao-fei PENG Zi-long LIAO Hong-wei LI Zuo-yi Huazhong University of Science and Technology  Institute of Physics and Center of Condensed Physics  Chinese Academy of Sciences
Affiliation:YANG Xiao-fei 1) PENG Zi-long 2) LIAO Hong-wei 1) LI Zuo-yi 1) 1)Huazhong University of Science and Technology, 2)Institute of Physics and Center of Condensed Physics,Chinese Academy of Sciences
Abstract:Ni 0.81Fe 0.19) 0.66Cr 0.34 has a high resistivity and a crystal structure close to that of Ni 0.81Fe 0.19.The electrical and X-ray diffraction measurements prove that a thin NiFeCr seed layer induces a well (111)-oriented Ni 0.81Fe 0.19 film.Post-annealing treatment improves the magnetic properties of (Ni 0.81Fe 0.19) 0.66Cr 0.34(45?)/Ni 0.81Fe 0.19(150?)/Ta(55?) thin film prepared under a deposition field,whereas the inter-diffusion of NiFe/Ta deteriorates the magnetoresistance properties of the film.
Keywords:permalloy film  AMR  buffer layer
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