| 微静电陀螺仪的结构设计与工艺实现 |
| |
| 引用本文： | 王嫘,韩丰田,董景新,刘云峰.微静电陀螺仪的结构设计与工艺实现[J].纳米技术与精密工程,2011,9(3):265-269. |
| |
| 作者姓名： | 王嫘 韩丰田 董景新 刘云峰 |
| |
| 作者单位： | 清华大学精密仪器与机械学系,北京,100084 |
| |
| 基金项目： | 国家高技术研究发展计划(863计划)资助项目，国家自然科学基金资助项目，航空科学基金资助项目 |
| |
| 摘 要： | 为了探索微机械陀螺突破精度极限的新途径,设计了一种基于环形转子、体硅加工工艺、转子5自由度悬浮的硅微静电陀螺仪.采用玻璃-硅-玻璃键合的三明治式微陀螺结构,提出了包括双边光刻、反应离子刻蚀(RIE)、电感耦合等离子体(ICP)刻蚀、玻-硅静电键合、硅片减薄、多层金属溅射等关键工艺的加工路线.在工艺设计中采用铝牺牲层对转子进行约束,在第2次玻-硅键合后再通过湿法去除牺牲层,以得到可自由活动的转子.基于提出的体硅工艺路线,成功加工出了微陀螺敏感结构,并完成了转子5自由度悬浮和加转实验,测试结果表明大气环境下转子转速可达73.3 r/min.
|
| 关 键 词： | 微静电陀螺 体硅工艺 铝牺牲层 静电键合 |
Design and Fabrication of an Electrostatically Suspended Micromachined Gyroscope |
| |
| WANG Lei,HAN Feng-tian,DONG Jing-xin,LIU Yun-feng.Design and Fabrication of an Electrostatically Suspended Micromachined Gyroscope[J].Nanotechnology and Precision Engineering,2011,9(3):265-269. |
| |
| Authors: | WANG Lei HAN Feng-tian DONG Jing-xin LIU Yun-feng |
| |
| Affiliation: | WANG Lei,HAN Feng-tian,DONG Jing-xin,LIU Yun-feng(Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China) |
| |
| Abstract: | In order to explore new inertial sensors aiming at higher precision than the current micromechanical gyroscopes,a bulk micromachining based electrostatically suspended gyroscope was designed with a ring-shaped rotor levitated stably in five degrees of freedom(DOFs).The proposed device was based mainly on glass-silicon-glass triple stack structure and silicon micromachining technology.The fabrication process of the gyroscope including bilateral photolithography,reactive ion etching(RIE),inductively coupled p... |
| |
| Keywords: | electrostatically suspended micromachined gyroscope bulk micromachining Al-sacrificial-layer anodic bonding |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
