| 一种微小物体精密定位的直线微工作台 |
| |
| 引用本文： | 彭玉鑫,高伟,金子純史,荒井義和,清水裕樹,冈本幸一,千叶美帆,相泽周二.一种微小物体精密定位的直线微工作台[J].纳米技术与精密工程,2011,9(3):221-227. |
| |
| 作者姓名： | 彭玉鑫 高伟 金子純史 荒井義和 清水裕樹 冈本幸一 千叶美帆 相泽周二 |
| |
| 作者单位： | 1. 日本东北大学纳米机械系纳米测量与控制实验室,仙台980-8579
2. 日本NEC/TOKIN株式会社,仙台982-8510 |
| |
| 摘 要： | 提出了一种基于平滑冲击驱动原理的精密定位直线微工作台.通过采用微小强磁铁作为摩擦元件,减小了由摩擦元件磨损而产生的摩擦力的变化,从而提高了微工作台的稳定性.设计制作了微工作台样机,并对精密定位工作台的动态特性和静态特性进行了实验研究.结果表明,微工作台体积小(20mm×10 mm×3 mm),可实现6 nm的精确定位,最高驱动速度可达5.4 mm/s,最大行程可达20 mm.
|
| 关 键 词： | 直线微工作台 平滑冲击驱动 压电元件 磁铁 精密定位 大行程 |
A Linear Micro-Stage with a Long Stroke for Precision Positioning of Micro-Objects |
| |
| PENG Yu-xin,GAO Wei,KANEKO Jun,ARAI Yoshikazu,SHIMIZU Yuki,OKAMOTO Koichi,CHIBA Miho,AISAWA Shuji.A Linear Micro-Stage with a Long Stroke for Precision Positioning of Micro-Objects[J].Nanotechnology and Precision Engineering,2011,9(3):221-227. |
| |
| Authors: | PENG Yu-xin GAO Wei KANEKO Jun ARAI Yoshikazu SHIMIZU Yuki OKAMOTO Koichi CHIBA Miho AISAWA Shuji |
| |
| Affiliation: | PENG Yu-xin1,GAO Wei1,KANEKO Jun1,ARAI Yoshikazu1,SHIMIZU Yuki1,OKAMOTO Koichi2,CHIBA Miho2,AISAWA Shuji2(1.Nano-Metrology and Control Lab,Department of Nanomechanics,Tohoku University,Sendai 980-8579,Japan,2.NEC/TOKIN Corporation,Sendai 982-8510,Japan) |
| |
| Abstract: | In this paper,a linear micro-stage with a long stroke was presented based on the principle of impact friction drive for precision positioning of micro-objects.By employing small and strong magnets as friction elements,the influence of changes in frictional force due to wear of friction elements can be reduced,which improves the stability of the stage.A prototype stage was designed and constructed,and experiments were carried out to test the basic performance of the stage.It has been verified that,with a com... |
| |
| Keywords: | linear micro-stage impact friction drive piezoelectric element(PZT) magnet precision positioning long stroke |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
