Radiation damage and annealing behaviour in Be+-implanted pure Ga(Al)Sb layers

Implantation of Be⁺ ions into GaAISb epilayers is used to realize thep ⁺ layer of the Ga_0.96Al_0.04Sb p⁺/Ga_0.96Al_0.04Sbn ⁻ /GaSbn ⁺ (1.55 /Μm) avalanche photodetector whose performances are detailed in Ref. (1). The GaAISb layers are grown using liquid phase epitaxy (LPE); the quality of these as-grown layers is shown through photoluminescence and channeling measurements. The last part of this paper is devoted to the damaging level in the Be⁺-implanted layers. Some annealing techniques are presented as a mean of restoration of the implanted layers. It is clear from the results that the Be⁺ ion implantation leads to a low damage level in this III-V compound.