| 实用超高真空比对校准系统 |
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| 引用本文： | 李正海. 实用超高真空比对校准系统[J]. 真空与低温, 2009, 15(1): 45-47 |
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| 作者姓名： | 李正海 |
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| 作者单位： | 兰州物理研究所,甘肃,兰州,730000 |
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| 摘 要： | 介绍了一种实用超高真空相对比对校准系统。该装置具有结构简单、实用、不确定度小等优点，可以满足在10^-7～10^-5Pa范围内超高真空规的比对校准。
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| 关 键 词： | 超高真空规 比对 校准 |
COMPARISON METHOD CALIBRATION APPARATUS OF ULTRA-HIGH VACUMM |
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| LI Zheng-hai. COMPARISON METHOD CALIBRATION APPARATUS OF ULTRA-HIGH VACUMM[J]. Vacuum and Cryogenics, 2009, 15(1): 45-47 |
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| Authors: | LI Zheng-hai |
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| Affiliation: | LI Zheng-hai (Lanzhou Institute of Physics, Lanzhou 730000, China) |
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| Abstract: | A kind of comparison method calibration apparatus of ultra-high vacuum is introduced, which has the advantages of simplicity, practicality and small uncertainty. This apparatus can calibrate ultra-high vacuum gauge in the 10^-7 - 10^-5 Pa range. |
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| Keywords: | ultrahigh vacuum gauge compar son calibration |
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