压电薄膜振动传感器灵敏度与频响标定研究

近年来，压电薄膜振动传感器发展十分迅速，已被广泛应用于结构健康监测、医疗电子、加速度、器件振动等测量。该文针对压电薄膜振动传感器的性能检测，设计了一套以可调频激振台作为核心的压电传感器灵敏度与频响特性标定装置。振动信号由可调频激振台提供，标准压电传感器与自制传感器同步进行振动测试。测试结果表明，该装置可方便地实现对被测传感器灵敏度和频率响应特性的标定。标定系统整体设计简单，操作方便。同时系统体积小，稳定性高，测量误差小，便于对各种类型的压电振动传感器进行检测，具有很强的实用性和广阔的发展空间。基于该系统对自制压电薄膜传感器性能的标定，研究了压电薄膜传感器灵敏度的影响因素。

Study on Calibration of Sensitivity and Frequency Response Characteristics ofPiezoelectric Thin Film Vibration Sensor

The piezoelectric thin film vibration sensors have developed rapidly in recent years and have been widely used in structural health monitoring, medical electronics, acceleration, device vibration and other measurements. Aiming at the performance detection of piezoelectric thin film vibration sensor, a set of calibration equipment for the sensitivity and frequency response characteristics of piezoelectric sensor is designed in this paper. The calibration equipment uses the frequency adjustable vibration table as its core part. The vibration signal is provided by the adjustable frequency vibration table, and the vibration test on the standard piezoelectric sensor and the self-made sensor is carried out simultaneously. The test results show that the equipment can easily calibrate the sensitivity and frequency response characteristics of the measured sensor. The overall design of the calibration system is simple and easy to operate. At the same time, the system has small volume, high stability and small measurement error, which is convenient for the detection of various types of piezoelectric vibration sensors, and has strong practicability and broad development space. Based on the calibration of the self-made piezoelectric thin film sensor performance by the system, the influencing factors on the sensitivity of the piezoelectric thin film sensor are studied.