| 光纤布拉格光栅三维测头 |
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| 引用本文： | 范哲光,费业泰,丁邦宙. 光纤布拉格光栅三维测头[J]. 计量学报, 2010, 31(2). DOI: 10.3969/j.issn.1000-1158.2010.02.05 |
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| 作者姓名： | 范哲光 费业泰 丁邦宙 |
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| 作者单位： | 合肥工业大学,仪器科学与光电工程学院,安徽,合肥,230009 |
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| 摘 要： | 介绍了一种以光纤布拉格光栅为传感元件的三维测头.测头结构核心为3根悬丝和支架组成的柔性支撑系统,传感系统由3根传感FBG和一根匹配FBG光栅组成.测头的关键参数测定结果为结构复位性精度小于20nm,传感系统重复性小于0.2mV,分辨力小于0.1μm,测力小于5mN.
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| 关 键 词： | 计量学 三维测头 柔性支撑结构 FBG传感系统 测头标定 |
3-D Probe of Fiber Bragg Grating |
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| FAN Zhe-guang,FEI Ye-tai,DING Bang-zhou. 3-D Probe of Fiber Bragg Grating[J]. Acta Metrologica Sinica, 2010, 31(2). DOI: 10.3969/j.issn.1000-1158.2010.02.05 |
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| Authors: | FAN Zhe-guang FEI Ye-tai DING Bang-zhou |
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| Abstract: | A 3-D probe based on Fiber Bragg Grating(FBG) is introduced. The flexible suspension which composed of three molybdenum threads and a plank is the key part of the structure. The sensor system is composed of three sensor FBG and a match FBG. The structure repeatability is less than 20 nm，the sensor system repeatability is 0.2 mV，the highest resolving power is 50 nm，and the probing force is less than 5 mN. |
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| Keywords: | Metrology 3-D Probe Flexible suspension FBG sensor system Probe calibration |
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