| 基于MEMS镍平面微弹簧尺寸误差分析 |
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| 引用本文： | 邵伟平,张继桃,郝永平,渠元菊,王威,谷双喜.基于MEMS镍平面微弹簧尺寸误差分析[J].机械设计,2012,29(8):80-82. |
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| 作者姓名： | 邵伟平 张继桃 郝永平 渠元菊 王威 谷双喜 |
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| 作者单位： | 1. 沈阳理工大学CAD/CAM技术研究与开发中心,辽宁沈阳,110159
2. 国营第五二四厂,吉林吉林,132021 |
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| 摘 要： | 对微机电系统(Micro-Electro-Mechanical System,MEMS)加工的S型微弹簧垂直方向弹性系数影响最大的参数是弹簧线宽b。鉴于此,特针对采用LIGA工艺加工出的两组不同弹簧的线宽进行了精密测量,分析计算出加工误差对弹性系数的影响大小,并对S型微弹簧的设计提出几点建议。
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| 关 键 词： | 微机电系统 S型微弹簧 弹性系数 加工误差 |
Analysis of dimension tolerance for MEMS Ni planar micro spring |
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| SHAO Wei-ping
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ZHANG Ji-tao
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HAO Yong-ping
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QU Yuan-ju
,
WANG Wei
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GU Shuang-xi.Analysis of dimension tolerance for MEMS Ni planar micro spring[J].Journal of Machine Design,2012,29(8):80-82. |
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| Authors: | SHAO Wei-ping ZHANG Ji-tao HAO Yong-ping QU Yuan-ju WANG Wei GU Shuang-xi |
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| Affiliation: | 1.R & D Center of CAD/CAM Technology,Shengyang Ligong University,Shenyang 110159,China;2.Jilin Jiangbei Machinery Manufacture Co.,Ltd.,Jilin 132021,China) |
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| Abstract: | For the S style micro spring machined by Micro-Electro-Mechanical Systems(MEMS),its line width "b" is the parameter having the biggest effect on its elastic coefficient in vertical direction.Because of this,precision measurement of the line width for two sets of different springs machined by applying LIGA technology has been carried out,the size of influence of machining error on spring coefficient has been analyzed and calculated,then offering some advices for S style spring design. |
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| Keywords: | MEMS S style micro spring spring coefficient fabrication error |
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