XPS study of palladium sensitized nano porous silicon thin film |
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Authors: | J KANUNGO L SELEGÅRD C VAHLBERG K UVDAL H SAHA S BASU |
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Affiliation: | 1.IC Design and Fabrication Centre, Department of Electronics and Telecommunications Engineering,Jadavpur University,Kolkata,India;2.Department of Physics, Chemistry and Biology (IFM),Link?ping University,Link?ping,Sweden |
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Abstract: | Nano porous silicon (PS) was formed on p-type monocrystalline silicon of 2–5 Ω cm resistivity and (100) orientation by electrochemical anodization method using HF
and ethanol as the electrolytes. High density of surface states, arising due to its nano structure, is responsible for the
uncontrolled oxidation in air and for the deterioration of the PS surface with time. To stabilize the material PS surface
was modified by a simple and low cost chemical method using PdCl2 solution at room temperature. X-ray photoelectron spectroscopy (XPS) was performed to reveal the chemical composition and
the relative concentration of palladium on the nanoporous silicon thin films. An increase of SiO2 formation was observed after PdCl2 treatment and presence of palladium was also detected on the modified surface. I–V characteristics of Al/PS junction were studied using two lateral Al contacts and a linear relationship was obtained for Pd
modified PS surface. Stability of the contact was studied for a time period of around 30 days and no significant ageing effect
could be observed. |
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