Synthesis of high purity silicon nanoparticles in a low pressure microwave reactor |
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Authors: | Knipping Jörg Wiggers Hartmut Rellinghaus Bernd Roth Paul Konjhodzic Denan Meier Cedrik |
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Affiliation: | Institut für Verbrennung und Gasdynamik, Universit?t Duisburg-Essen, D-47048 Duisburg, Germany. |
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Abstract: | The formation of pure single crystalline silicon nanoparticles by microwave induced decomposition of silane in a low pressure flow reactor is reported. The morphology and crystal structure of the particles are characterized in situ by particle mass spectrometry (PMS) and ex situ by means of X-ray diffraction, high resolution transmission electron microscopy, electron energy loss spectroscopy, and infrared spectroscopy. The preparation method allows for the adjustment of the mean particle diameter in the range 6 nm < or = dPM < or = 11 nm by controlling the precursor concentration, gas pressure, and microwave power. Spectroscopic investigations reveal that the particles are single crystal silicon. The potential on n- or p-type doping is in progress. |
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