A three-phased circular electrode array for electro-osmotic microfluidic pumping |
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| Authors: | Kongying Xie Yongjun Lai Xin Guo Rob J Campbell |
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| Affiliation: | (1) Department of Mechanical and Materials Engineering, Queen’s University, Kingston, ON, K7L 3N6, Canada;(2) Department of Ophthalmology, Queen’s University, Kingston, ON, K7L 3N6, Canada;(3) Hotel Dieu Hospital, Kingston, ON, K7L 5G2, Canada; |
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| Abstract: | A circular micro-electrode array with three phases is designed and prototyped using PolyMUMPs process for AC electro-osmotic
flow pumping. Finite element model of the micro electrode array has been developed using COMSOL Multiphysics™. Performance of the electrode array is simulated and a double peak velocity phenomenon is found for this design, which is
confirmed by experimental testing. Using ethanol as testing medium, the two time-averaged peak flow velocities are approximate
320 μm/s at 7 Hz and 850 μm/s at 100 Hz. It is found that the simulated and experimental results agree well. |
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