Measured resonance characteristics of a 2-ghz-fundamental quartz resonator

I fabricated an inverted-mesa AT-cut quartz resonator in which the thickness of the vibrating area was adjusted to 0.6 /spl mu/m by wet etching, and I demonstrated the excitation of a fundamental thickness vibration of 2.074 GHz. This main mode was inductive, and Q was 1037. However, all inharmonic modes were capacitive.