Measured resonance characteristics of a 2-ghz-fundamental quartz resonator |
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Authors: | Iwata Hirokazu |
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Affiliation: | Dept. of Electr. & Commun. Eng., Tohoku Univ., Japan; |
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Abstract: | I fabricated an inverted-mesa AT-cut quartz resonator in which the thickness of the vibrating area was adjusted to 0.6 /spl mu/m by wet etching, and I demonstrated the excitation of a fundamental thickness vibration of 2.074 GHz. This main mode was inductive, and Q was 1037. However, all inharmonic modes were capacitive. |
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