Modelling and experimental study of machined depth in AFM-based milling of nanochannels |
| |
| Affiliation: | 1. Center For Precision Engineering, P.O. Box 413, Harbin Institute of Technology, Harbin, Heilongjiang 150001, PR China;2. State Key Laboratory of Physical Chemistry of Solid Surface, Xiamen University, Xiamen, Fujian 361005, PR China;1. The State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang, 150080, PR China;2. Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang, 150001, PR China;1. The State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang 150080, PR China;2. Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, PR China;3. Cardiff School of Engineering, Cardiff University, Cardiff, UK;1. The State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang 150080, PR China;2. Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, PR China;1. The State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang 150080, PR China;2. Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, PR China;3. Cardiff School of Engineering, Cardiff University, Cardiff, UK |
| |
| Abstract: | A nanochannel depth prediction model for an atomic force microscopy (AFM)-based nano-milling fabrication technique was developed and the relationship between the normal load, tip feed, and nanochannel depth was systematically investigated. Machining experiments were performed to fabricate nanochannels on a 2A12 aluminum alloy surface, the depth of which was compared with that calculated with the model. The model predicted the depth of the nanochannels accurately when a feed in the range of 40–90 nm was used during machining. The cutting mechanism played an important role in determining the consistency of the experimental and theoretical results. In addition, the effects of normal load and feed on the surface quality of the machined nanochannel were studied. A nanochannel with a 3D structure at the bottom is presented by the nano-milling method. To machine a nanochannel with a desired depth, the appropriate normal force and feed to guarantee the surface quality can be selected simply and easily using this model. |
| |
| Keywords: | Atomic force microscope (AFM) Nanochannel Feed Normal load |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
