相移条纹投影三维形貌测量技术综述

结构光三维形貌测量系统目前得到了越来越广泛的应用和研究,相移条纹投影三维形貌精密测量技术是其重要的发展方向。对结构光相移条纹投影三维形貌测量系统的应用发展、工作过程、不同系统构成方式、相移条纹的各种形式及特点、相位误差校正方法、不同相位解包裹算法及其优缺点和适用场合、测量系统数学模型的实现方法及其相应的优缺点、高动态范围测量技术等进行了详细的分析。对相移条纹投影系统的工作流程、实现方法、关键技术的发展及其存在问题等进行了比较全面的梳理,为三维形貌精密测量技术进一步满足先进制造中更高精度的要求指出了后续的研究方向。

Overview of the 3D Profilometry of Phase Shifting Fringe Projection

Structured light three-dimensional (3D) measurement system has been widely used and studied in optical metrology recent years. 3D surface construction methods with fringe projection techniques have become one of the most active research areas. The measurement principle, working process, system configurations, phase shifting fringes, phase error correction, phase unwrapping, high dynamic range measurement method are detailed. The advantages and disadvantages of the techniques are also discussed. The working flow, realization method, key techniques and existing problems of a phase shifting fringe projection system are introduced comprehensively, and the subsequent research directions are pointed out for the 3D shape measurement technology to meet the requirements of higher precision in advanced manufacturing in the further.